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发明名称
PLASMA ETCHING METHOD
摘要
申请公布号
EP1691402(A4)
申请公布日期
2008.07.23
申请号
EP20040819793
申请日期
2004.11.26
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人
OKUNE, MITSUHIRO;HIROSHIMA MITSURU;SUZUKI HIROYUKI;MIYAKE SUMIO;WATANABE SHOUZOU
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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