OPTICAL THIN FILM, OPTICAL DEVICE AND METHOD FOR PRODUCING SAME

摘要

In an optical thin film of the present invention, a hydrogenated carbon film containing at least carbon and hydrogen as major components is formed on a substrate, and at least one protective layer including one of an oxide film, a nitride film, an oxynitride film, a fluoride film, and a film containing hydrogen and carbon as major components is superposed thereon.