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经营范围
发明名称
Plasma resistant member
摘要
申请公布号
KR100848165(B1)
申请公布日期
2008.07.23
申请号
KR20020016849
申请日期
2002.03.27
申请人
发明人
分类号
H01L21/205;H05H1/46;B32B18/00;C04B35/44;C04B35/50;C04B35/505;C04B41/52;C04B41/89;C23C14/00;C23C16/44;H01J37/32;H01L21/302
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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