发明名称 CONTROL METHOD, AND CONTROL SYSTEM
摘要 <p>Provided is a method for managing manufacturing apparatuses used in a managed production line including a plurality of manufacturing processes for manufacturing an electronic device, each of the apparatuses being used in each of the processes, the method including: acquiring a property of a reference device manufactured in a predetermined reference production line including the manufacturing processes; performing at least one of the manufacturing processes in the managed production line, performing the other manufacturing processes in the reference production line, and manufacturing a comparison device; measuring a property of the comparison device; comparing the measured properties between the reference and the comparison devices; and judging whether the manufacturing apparatus used in the at least one manufacturing process is defective or not, based on a property difference between the reference and the comparison devices.</p>
申请公布号 EP1947539(A1) 申请公布日期 2008.07.23
申请号 EP20050787747 申请日期 2005.09.27
申请人 ADVANTEST CORPORATION;NATIONAL UNIVERSITY CORPORATION TOHOKU UNVERSITY 发明人 OKAYASU, TOSHIYUKI;SUGAWA, SHIGETOSHI;TERAMOTO, AKINOBU
分类号 G05B19/418;H01L21/02;H01L21/66 主分类号 G05B19/418
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