发明名称 |
CONTROL METHOD, AND CONTROL SYSTEM |
摘要 |
<p>Provided is a method for managing manufacturing apparatuses used in a managed production line including a plurality of manufacturing processes for manufacturing an electronic device, each of the apparatuses being used in each of the processes, the method including: acquiring a property of a reference device manufactured in a predetermined reference production line including the manufacturing processes; performing at least one of the manufacturing processes in the managed production line, performing the other manufacturing processes in the reference production line, and manufacturing a comparison device; measuring a property of the comparison device; comparing the measured properties between the reference and the comparison devices; and judging whether the manufacturing apparatus used in the at least one manufacturing process is defective or not, based on a property difference between the reference and the comparison devices.</p> |
申请公布号 |
EP1947539(A1) |
申请公布日期 |
2008.07.23 |
申请号 |
EP20050787747 |
申请日期 |
2005.09.27 |
申请人 |
ADVANTEST CORPORATION;NATIONAL UNIVERSITY CORPORATION TOHOKU UNVERSITY |
发明人 |
OKAYASU, TOSHIYUKI;SUGAWA, SHIGETOSHI;TERAMOTO, AKINOBU |
分类号 |
G05B19/418;H01L21/02;H01L21/66 |
主分类号 |
G05B19/418 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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