发明名称 PHOTOMASK MATERIALS, PHOTOMASK AND METHOD OF PRODUCING PHOTOMASK
摘要 A photomask material, a photomask using the photomask material, and a method for preparing the photomask are provided to improve sensitivity, mechanical strength, hardness and solvent resistance. A photomask material comprises a transparent base; and a photosensitive transfer material which is laminated so as to allow its photosensitive side to face with the base, wherein the photosensitive transfer material is provided with a photosensitive layer which comprises an alkali-soluble resin binder having a polymerizable unsaturated bond, a monomer at least one polymerizable unsaturated bond, a photopolymerization initiator having the photosensitivity to the light having a wavelength of 405 nm or less, and a colorant whose surface is treated with a polymerizable dispersant.
申请公布号 KR20080068623(A) 申请公布日期 2008.07.23
申请号 KR20080064764 申请日期 2008.07.04
申请人 FUJIFILM CORPORATION 发明人 TAKAYANAGI TAKASHI
分类号 G03F7/027;G03F7/028;C08F290/12;G03F1/08;G03F1/10;G03F1/56;G03F7/004;G03F7/11 主分类号 G03F7/027
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