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发明名称
Récipients pour la fabrication ou le traitement de semi-conducteurs
摘要
申请公布号
FR1301121(A)
申请公布日期
1962.08.10
申请号
FR19610871812
申请日期
1961.08.29
申请人
SCHUNK & EBE G. M. B. H.
发明人
分类号
C23C16/26;C30B13/14
主分类号
C23C16/26
代理机构
代理人
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