| 摘要 |
<p>A microwave plasma generator in which the generating amount of radicals can be regulated easily with higher reaction efficiency while reducing gas consumption. The microwave plasma generator comprises an outer conductor (2), / an inner conductor (3) arranged in the internal space (4) of the outer conductor, a discharge tube (7) having a double tube structure consisting of an inner tube (5) and an outer tube (6) and penetrating the outer and inner conductors in the axial direction, and a cavity (1) having a means for adjusting the position of the inner tube to the outer tube in the axial direction in the discharge tube. The microwave plasma generator is further provided with a first gas supply pipe (16), which has a first flow control valve (18) and supplies first gas from a gas cylinder (14) to the outer tube of the discharge tube, a second gas supply pipe (17), which has a second flow control valve (19) and supplies second gas to the inner tube of the discharge tube, a microwave generation source (21), and a microwave supplying passage (22) for supplying microwave from the microwave generation source to the cavity.</p> |
