发明名称 |
PROZESS ZUR BILDUNG MINIATURISIERTER GETTER- ABLAGERUNGEN UND SO ERHALTENE GETTERABLAGERUNGEN |
摘要 |
A process is provided for the formation of miniaturized getter deposits, comprising the steps of forming a layer of a photosensitive polymeric material on a support; selectively exposing the polymeric layer in order to cause a chemical modification in a portion of the polymeric layer; removing with a first solvent only one of the previously exposed or the not previously exposed portions of the polymeric layer, thus forming cavities in the polymeric layer; forming a thin layer of a getter material by cathodic deposition at the bottom of the cavity and on the residual polymer; and removing with a second solvent the polymer portion not removed by the first solvent, leaving at least a getter material deposit on the support surface. |
申请公布号 |
AT398831(T) |
申请公布日期 |
2008.07.15 |
申请号 |
AT20060745274T |
申请日期 |
2006.04.11 |
申请人 |
SAES GETTERS S.P.A. |
发明人 |
MORAJA, MARCO;CONTE, ANDREA;GUADAGNUOLO, SARA |
分类号 |
H01L21/027;G03F7/004 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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