| 摘要 |
<p>A semiconductor fabricating equipment including plural gas cleaning sticks is provided to reduce an equipment expense by connecting at least two process chambers using one cleaning gas stick to supply a cleaning gas through the cleaning gas stick. A gas panel(110) has plural process gas sticks(112,114,116,118) for supplying a process gas to process chambers(102,104,106,108), and plural cleaning gas sticks(120,122) for supplying a cleaning gas to the process chambers. The process gas sticks are connected to the process chambers by plural process gas supply lines(130a to 130d). The cleaning gas sticks are connected to plural cleaning gas supply lines(132a,132b) to supply the cleaning gas to the process chambers.</p> |
