| 摘要 |
To provide a film forming method and a film forming system, which efficiently use materials and forming a high-quality organic thin film, and an electronic device and an electronic apparatus that are manufactured using the method and the device, an organic thin film-forming system includes a solution supplying unit, a gas supplying unit, a soft ionizing unit, and an ion separating unit, a deflecting unit, and a film-forming unit. After organic materials to be converted in film become minute liquid droplets in the soft ionizing unit and the liquid droplets are ionized or charged, the liquid droplets are vaporized and thus pseudo-molecular ions of a vapor state are created. In the ion separating unit, an organic material pseudo-molecular ion is separated from the pseudo-molecular ions. A predetermined stick voltage is applied to a plurality of electrodes formed on a substrate of an electronic device forming the organic thin film using a circuit previously formed on the substrate and thus the organic material pseudo-molecular ion is selectively stuck to a predetermined electrode.
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