发明名称 Nitride optoelectronic devices with backside deposition
摘要 Nitride optoelectronic devices that have asymmetric double-sided structures and methods fabricating such structures are disclosed. Two n-type III-N layers are formed simultaneously over opposite sides of a substrate with substantially the same composition. Thereafter, a p-type III-N active layer is formed over one of the n-type III-N layers but not over the other.
申请公布号 US7399653(B2) 申请公布日期 2008.07.15
申请号 US20060414581 申请日期 2006.04.28
申请人 APPLIED MATERIALS, INC. 发明人 BOUR DAVID;SMITH JACOB;SU JIE;NIJHAWAN SANDEEP
分类号 H01L21/00;H01L33/00 主分类号 H01L21/00
代理机构 代理人
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