发明名称 High-voltage transistor having a U-shaped gate and method for forming same
摘要 According to one exemplary embodiment, a method includes forming first, second, and third shallow trench isolation regions in a substrate, wherein the second shallow trench isolation region is situated between the first and the third shallow trench isolation regions. The second shallow trench isolation region is removed to form a transistor channel trench. A substantially U-shaped gate is formed in the transistor channel trench. According to another embodiment, a transistor includes a substrate, and first and second shallow trench isolation regions in the substrate. A substantially U-shaped gate is formed in the substrate between said first and second shallow trench isolation regions.
申请公布号 US7400013(B1) 申请公布日期 2008.07.15
申请号 US20040003528 申请日期 2004.12.03
申请人 SPANSION LLC 发明人 ARIYOSHI JUNICHI
分类号 H01L23/62 主分类号 H01L23/62
代理机构 代理人
主权项
地址