发明名称 SEMICONDUCTOR MEMORY DEVICE AND TEST METHOD THEREOF
摘要 A semiconductor memory device and a method for testing the same are provided to secure contacting states of pads by increasing a pad size and a pad pitch in a wafer test process. A plurality of internal circuits are formed in a die. A plurality of first and second channel pads(20-1 to 20-(N+1),30-1 to 30-(N+1)) having a first pad size and a first pad pitch are alternately arranged in parallel to each other on a straight line of the die. The first and second channel pads alternately and selectively come in contact with test probes(150-1 to 150(N+1)) in order to receive a wafer test signal from the outside and to output signals of the internal circuits to the outside. A probe card is formed at an interval of the first or the second channel pads in order to test the first or the second channel pads.
申请公布号 KR20080065827(A) 申请公布日期 2008.07.15
申请号 KR20070002958 申请日期 2007.01.10
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 JEONG, WOO SEOP;KIM, YONG JUN;LEE, KYU CHAN
分类号 H01L21/66 主分类号 H01L21/66
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