发明名称 |
Vacuum processing system being able to carry process object into and out of vacuum chamber |
摘要 |
First and second load-lock mechanisms are installed in a vacuum chamber. An external arm and first and second robot arms are disposed outside of the vacuum chamber. The external arm can hold a process object and can carry the held process object either into the first load-lock mechanism or into the second load-lock mechanism. The first robot arm can transfer the process object between a stock site outside of the vacuum chamber and the first load-lock mechanism and between the stock site and the external arm. The second robot arm can transfer the process object between the stock site and the second load-lock mechanism and between the stock site and the external arm.
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申请公布号 |
US7399154(B2) |
申请公布日期 |
2008.07.15 |
申请号 |
US20040806149 |
申请日期 |
2004.03.23 |
申请人 |
TAMAI TADAMOTO |
发明人 |
TAMAI TADAMOTO |
分类号 |
B65G49/07;H01J37/20;H01J37/317;H01L21/00;H01L21/265;H01L21/677;H01L21/68 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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