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发明名称
TIEFTEMPERATUR-STRAHLUNGSBILDAUFNAHMEVORRICHTUN MIT HÖCKER-BONDVERBINDUNG
摘要
申请公布号
AT400895(T)
申请公布日期
2008.07.15
申请号
AT20030712573T
申请日期
2003.03.12
申请人
OY AJAT LTD.
发明人
VUORELA, MIKKO
分类号
H01L27/146;G01T1/24;H01J40/14
主分类号
H01L27/146
代理机构
代理人
主权项
地址
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