发明名称 VORRICHTUNG UND VERFAHREN ZUR MESSUNG DER SENSORKAPAZITÄT
摘要 A capacitor C and an impedance converter Hiz are included in a feedback circuit of the first operational amplifier OP1 in series; an electrode P1 of a capacitive sensor is connected to a connection point of the said capacitor and the converter via a signal line L. The signal line L is connected to a predetermined standard electric potential through resistance R3 whose resistance value is high. When the capacitor is included in the feedback circuit, the signal line becomes in a state of floating and a circuit operation becomes unstable, however, the signal line L is fixed at predetermined electric potential, and therefore, the operation becomes stable. It is acceptable to configure the impedance converter with a voltage follower and connect the resistance R3 to the output. <IMAGE>
申请公布号 AT399327(T) 申请公布日期 2008.07.15
申请号 AT20020765437T 申请日期 2002.09.06
申请人 TOKYO ELECTRON LIMITED 发明人 YAKABE, MASAMI
分类号 G01R27/26;G01D5/24;G01N27/22;H04R3/00;H04R3/06 主分类号 G01R27/26
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