| 摘要 |
Transportation equipment of an etching chamber is provided to move easily an escalating unit along an X or Y axis direction by implementing a guide roller at a lower portion of a base panel of the escalating unit. Transportation equipment of an etching chamber includes a chamber supporting plate(200) and an escalating unit(100). The chamber supporting plate, which is positioned at an upper portion of a chamber, includes a chamber supporting wire for coupling with a ring through fixing holes and up/down wires and a webbing(6) fixed through the rest fixing holes. The escalating unit, which is positioned at an upper portion of the chamber supporting plate, includes a webbing roller and a motor(M1) used for moving the up/down wires and the webbing, a driving gear coupled with the motor, a first gear coupled with the driving gear, a first rotation shaft having plural bobbins for winding a part of the up/down wires, a second gear coupled with the first gear, and a second shaft having plural bobbins for winding the rest up/down wires.
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