发明名称 |
High density, low oxygen Re and Re-based consolidated powder materials for use as deposition sources & methods of making the same |
摘要 |
<p>A method of making Re and Re-based materials comprises steps of: providing a Re powder starting material or a Re powder starting material and at least one additional powder material; subjecting at least the Re powder to a first degassing treatment for reducing the oxygen content thereof; increasing the density of the degassed Re powder or a mixture of the degassed Re powder and the at least one additional powder material to form a green billet; subjecting the billet to a second degassing treatment to further reduce the oxygen content; and consolidating the billet to form a consolidated material with greater than about 95 % of theoretical density and low oxygen content below about 200 ppm for Re and below about 500 ppm for Re-based materials formed from the mixture, excluding oxygen from non-metallic compounds and ceramics. Materials so produced are useful in the manufacture of deposition sources such as sputtering targets.</p> |
申请公布号 |
EP1942202(A2) |
申请公布日期 |
2008.07.09 |
申请号 |
EP20080100218 |
申请日期 |
2008.01.08 |
申请人 |
HERAEUS, INC. |
发明人 |
YANG, FENGLIN;DERRINGTON, CARL;KUNKEL, BERND |
分类号 |
C22C27/00;B22F1/00;C22C1/04;C23C14/34 |
主分类号 |
C22C27/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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