| 摘要 |
<p>The system has a target object unit (11) with a reference light transmitter (23), which is designed in such a manner that the transmitter transmits reference light radiation with curved light wave front. The unit (11) has a detector array with multiple detector pixels. Distance information is determined by changes of distances between the detector pixel and the light transmitter, by evaluation of interference signals from the detector pixels. Local position of the target object relative to the measure light transmitter is determined using the distance information. An independent claim is also included for a scanning system for scanning a surface of a scanning object.</p> |
