| 摘要 |
<p>A method and a device are provided for precisely moving a mobile body (48,49) in the vertical direction even when a large force is applied onto a sliding surface. The device (40) combines piezo elements (45,46A,47A) causing shear deformation and piezo elements (46B,47B) causing vertical deformation with the wedge (44). The piezo elements may be stacked on each other.
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