THIN-FILM COMPOSITE AND A GLASS CERAMIC SUBSTRATE USED IN A MINIATURISED ELECTROCHEMICAL DEVICE

摘要

A composite element comprising a thin film that consists of at least two layers of an oxide-ceramic and metallic material, or a metallic material and an essentially flat substrate that supports the thin film. Said substrate is composed of a ceramicizable glass, a glass ceramic, a hybrid form or an intermediate product. To produce the substrate, selected regions are dissolved out of the photostructurable glass substrate. The composite element can be successfully used in a miniaturised electrochemical device, in particular in a solid oxide fuel cell SOFC, a sensor or as a gas separation membrane.