METHOD FOR MANUFACTURING OF THIN FILM TRANSISTOR ARRAY PANEL

摘要

A method for manufacturing a thin film transistor display panel is provided to realize dark black during driving of a black screen by removing particles generated on a surface of a first gate insulation layer. A method for manufacturing a thin film transistor display panel includes: forming a gate wire(22) having a gate electrode(26) on an insulation substrate; forming a first gate insulation layer covering the gate wire, carrying out first plasma processing on a surface of the first gate insulation layer; washing a surface of the first gate insulation layer; carrying second plasma processing on a surface of the first gate insulation layer; forming a second gate insulation layer on the first gate insulation layer; forming a semiconductor pattern on a second gate insulation layer; forming a data wire including source and drain electrodes that are separated from each other on the semiconductor pattern; and forming a pixel electrode electrically connected to the drain electrode.