LIQUID LENS AND A METHOD FOR PRODUCING THE SAME

摘要

A liquid lens and a method for producing the same are provided to simplify a process and form uniform films by simultaneously forming an insulating film and a hydrophobic film. A method for producing a liquid lens includes the steps of: supplying a middle silicon substrate(310) with an opening portion at a center; coating a hydrophobic insulating film(340) on a top surface, an internal surface, and a bottom surface of the middle substrate except for a port of the top surface thereof; supplying a transparent lower substrate(410) with an electrode at a peripheral portion of a top surface; coating a second hydrophobic film(440) on at least a portion of a top surface of the electrode; bonding the middle substrate and the lower substrate; filling conductive liquid and non-conductive liquid in the opening portion and a space surrounded by the lower substrate; supplying a transparent upper substrate(210) with an electrode at a peripheral portion of a bottom surface; forming a metal bump(240) on at least a portion of a bottom surface of the electrode; and bonding the upper substrate and the middle substrate.