METHOD AND SYSTEM FOR CALIBRATING A MICRO-ELECTROMECHANICAL SYSTEM (MEMS) BASED SENSOR USING TUNNELING CURRENT SENSING

摘要

A tunneling current control system is provided to obtain a current sensor to be appropriately used even in a small space by using a tunneling current based magneto-MEMS component. A tunneling current control system includes a current sensor(100) having a conductor(4). The conductor generates a magnetic field(20). The current sensor is used to detect current(I) flowing through a current conductor in a non-contact manner. The current sensor use Lorenz power formed when the current sensor is disposed in the magnetic field induced by the current. The current sensor includes a tunneling current based magneto-MEMS component.