发明名称 Clamping device and transport mechanism for transporting substrates
摘要 A clamping device contains a clamp jaw fixed in vertical direction, a clamp jaw moveable in vertical direction and a force transducer for applying a force to the moveable clamp jaw. The moveable clamp jaw is curved. The force transducer preferably comprises a coil and an iron core. In the non-clamping condition of the clamping device, the moveable clamp jaw is loaded with the weight of the iron core. For clamping, a current is applied to the coil that produces a magnetic field that presses the iron core against the moveable clamp jaw.
申请公布号 US7396005(B2) 申请公布日期 2008.07.08
申请号 US20050240870 申请日期 2005.09.29
申请人 UNAXIS INTERNATIONAL TRADING LTD. 发明人 BERSET JEAN-BAPTISTE;DEFLORIN MARTIN;MENET PASCAL
分类号 B25B1/16 主分类号 B25B1/16
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