Detection method/device of probe's tip location using a transparent film attached to a substate having plurality of electrodes, and a storage medium for implementing the method

摘要

A method for detecting tip positions of probes which is performed prior to the wafer test includes a first step of attaching the transparent film F on the test substrate W having the electrodes P arranged same as those of the wafer; a second step of detecting the electrodes P of the test substrate W by using the first CCD camera 13 A; a third step of detecting a surface height of the transparent film F; a fourth step of position-aligning the electrodes P of the test substrate W with the probes 12 A. The method further includes a fifth step of forming the probe marks M on the transparent film F by making the probes 12 A contact with the transparent film F; and a sixth step of detecting tip positions of the probes 12 A based on the electrodes P of the test substrate W and the probe marks M.