| 发明名称 |
Force method for determining the spring constant of scanning probe microscope cantilevers using MEMS actuators |
| 摘要 |
In accordance with the invention, the spring constant of a scanning probe microscope cantilever mechanically coupled to a MEMs actuator may be determined in-situ by application of a force to the scanning probe microscope cantilever.
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| 申请公布号 |
US7395697(B2) |
申请公布日期 |
2008.07.08 |
| 申请号 |
US20060458017 |
申请日期 |
2006.07.17 |
| 申请人 |
AGILENT TECHNOLOGIES, INC. |
发明人 |
WORKMAN RICHARD K.;HOEN STORRS T.;CLIFFORD, JR. GEORGE M. |
| 分类号 |
G01B5/28;G01Q10/04;G01Q40/00 |
主分类号 |
G01B5/28 |
| 代理机构 |
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| 主权项 |
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