发明名称 Interferometer and shape measuring method
摘要 A wavelength-variable light source is configured to emit a light with a wavelength (lambda), which is variable within a scan width (Deltalambda). An interferometer has a coherent length (DeltaL), which is determinable from (Deltalambda) and (lambda). A controller determines an appropriate magnitude of the scan width (Deltalambda) while a CCD camera captures a fringe image in an exposure time (Te), which is set longer than a time for wavelength scanning.
申请公布号 US7397570(B2) 申请公布日期 2008.07.08
申请号 US20060433485 申请日期 2006.05.15
申请人 MITUTOYO CORPORATION 发明人 KAWASAKI KAZUHIKO;SUZUKI YOSHIMASA;SESKO DAVID W.
分类号 G01B11/02 主分类号 G01B11/02
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