HIGH EFFICIENCY HEATER RESISTOR CONTAINING A NOVEL OXIDES BASED RESISTOR SYSTEM, HEAD AND APPARATUS OF EJECTING LIQUID, AND SUBSTRATE FOR HEAD EJECTING LIQUID

摘要

A high efficiency heater resistor containing novel oxides based resistor system, a head and an apparatus of ejecting liquid, and a substrate for a liquid ejecting head are provided to have an excellent heat generation performance by using new materials formed by mixing conductive oxides with non-conductive oxides. A substrate for a liquid ejecting head includes a silicon substrate layer(701), an insulating layer(702), a heat generating resistor(703), and an electrode layer(704). The insulating layer is formed on the silicon substrate layer. The heat generating resistor generates thermal energy by an electric signal. The electrode layer supplies the electric signal to the heat generating resistor. The substrate further includes a single layer or multi-layers of protection layer to protect the electrode layer and the heat generating resistor. And, the heat generating resistor includes conductive oxides having electric conductivity and non-conductive oxides having insulation or non-conductivity.