APPARATUS FOR OPENING AND CLOSING DOOR OF CHAMBER

摘要

A door opening/closing apparatus for chamber is provided to minimize an occupied area of doors when opened by overlapping the doors. A door opening/closing apparatus for chamber includes first and second doors(110a,110b) and a horizontal moving unit(120). The first and second doors are arranged in parallel in order to cover the opening of a chamber. The horizontal moving unit opens/closes the opening of the chamber by moving the first door to the lateral part of the chamber and moving the second door to be overlapped with the first door. The horizontal moving unit moves the first and second doors so that a moving distance ratio of the second door to the first door is 1:2.