发明名称 DEVICE AND ITS USE FOR COATING OF OBJECTS
摘要 <p>An apparatus for performing two-dimensional surface coating of objects includes a hollow cylinder open at opposite ends thereof, a plunger axially moveable therein and having at least one receptacle with a receiving opening of an axial extent through which the object can be inserted and removed, and a first conveying device for conveying objects to be coated. The hollow cylinder has at least one first area and a second area which can be sealed off from the plunger, the at least one first area being at an end of the hollow cylinder and having an axial extent greater than the axial extent of the receiving opening. The second area is sealed against atmospheric pressure relative to the plunger regardless of plunger position. The second area of the hollow cylinder is constructed and arranged for passing transversely therethrough by the conveying device when the receptacle is aligned therewith, for transfer of an object to or from a coating device.</p>
申请公布号 PT969119(E) 申请公布日期 2008.07.04
申请号 PT19990110115T 申请日期 1999.05.25
申请人 SCHOTT SOLAR GMBH 发明人 THOMAS LAUINGER
分类号 C23C14/56;B65G49/07;C23C16/44;C23C16/54;H01L21/00;H01L21/205;H01L21/677;H01L31/18 主分类号 C23C14/56
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