SEMICONDUCTOR DEVICE HAVING FLOATING BODY DEVICE AND BULK BODY DEVICE AND METHODS OF FABRICATING THE SAME

摘要

A semiconductor device having a floating body element and a bulk body element and a manufacturing method thereof are provided to form a circuit having various functions on one chip by forming a system on chip having a bulk body element and a floating body element. A substrate includes a bulk body element region and a floating body element region. An isolation layer is formed to define an active region of the substrate corresponding to the bulk body element region and to define a plurality of first buried patterns(124a) and a plurality of active patterns(106a) on the substrate corresponding to a first element region(A) of the floating body element region. A first buried dielectric layer is inserted between the first buried patterns and the substrate and between the first buried patterns and the first active patterns.