FEEDING POWER CONNECTOR AND ELECTRO-STATIC CHUCK DEVICE,申请号KR20060085158-传众专利搜索

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发明名称	FEEDING POWER CONNECTOR AND ELECTRO-STATIC CHUCK DEVICE
摘要
申请公布号	KR100844204(B1)	申请公布日期	2008.07.04
申请号	KR20060085158	申请日期	2006.09.05
申请人		发明人
分类号	H01L21/683;H01L21/687	主分类号	H01L21/683
代理机构		代理人
主权项
地址

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