METHOD OF MEASURING TERMINAL HEIGHT OF ELECTRONIC COMPONENT

摘要

PROBLEM TO BE SOLVED: To enable height measurement of an electronic component even if the position of the electronic component is incorrectly deviated.

SOLUTION: A method of measuring terminal height of the electronic component for measuring the height of a terminal by a light cutting method by scanning line light pulse-lighting a laser on the electronic component includes: imaging scattering reflection light while scanning the line light continuously lighting the laser over a deviation estimation range of a terminal edge; acquiring the terminal position of the electronic component based on imaged images; and delaying a scanning speed by a linear actuator of the line light by continuous lighting of the laser to the electronic component in which scattering reflection light of the laser is weak when correcting a laser lighting position for measuring the terminal height from position information.

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