Pump Apparatus and Pump Unit Thereof

摘要

A pump apparatus comprises a low-temperature flat plate group (a low-temperature portion) C having flat plates 5 as a plurality of low-temperature bodies arranged parallel with each other with intervals in a direction crossing a passage 4 of gas, a high-temperature flat plate group (a high-temperature portion) H having flat plates 6 as a plurality of high-temperature bodies arranged parallel with each other with intervals in the direction crossing the passage 4 , and temperature operation means for operating at least one of temperatures of the flat plate groups to generate temperature difference between the flat plate groups. The flat plates 5 and the flat plates 6 are displaced from each other in a flow direction in the passage 4 , and a heat insulating layer interposed between the flat plates 5 and the flat plates 6.