发明名称 METHOD FOR PRETREATMENT OF SUBTRATE USING ELECTROSTATIC SELF-ASSEMBLY PROCESS WITH NANO DIAMOND PARTICLES AND DEPOSITION METHOD FOR DIAMOND THIN FILM USING THE SAME
摘要 A method for pre-treating a substrate using an electrostatic self-assembly process with nano diamond particles and a method for depositing a diamond thin film using the same. A surface of a nano diamond particle is coated with a polymer having an opposite polarity with respect to an electrostatic charge on the surface of the nano diamond particle. A surface of a substrate is treated with a polymer having an opposite polarity with respect to an electrostatic discharge on the substrate. The surface-treated substrate is immersed into a solution in which the coated nano diamond particles are dispersed. The nano diamond particle is deposited on the substrate through an electrostatic self-assembly process, so that it is used as a deposition core during a diamond thin film deposition. The polymer is selected from a group consisting of PSS(Poly Sodium 4-styrenen sulfonate), poly S-119, polyaniline, nafion, and PDDA(Poly DiallylDimethyl Ammonium chloride).
申请公布号 KR20080063227(A) 申请公布日期 2008.07.03
申请号 KR20070141892 申请日期 2007.12.31
申请人 KOREA UNIVERSITY INDUSTRIAL & ACADEMIC COLLABORATION FOUNDATION 发明人 LIM, DAE SOON;KIM, JONG HOON
分类号 H01L21/208 主分类号 H01L21/208
代理机构 代理人
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