发明名称 |
METHOD FOR PRETREATMENT OF SUBTRATE USING ELECTROSTATIC SELF-ASSEMBLY PROCESS WITH NANO DIAMOND PARTICLES AND DEPOSITION METHOD FOR DIAMOND THIN FILM USING THE SAME |
摘要 |
A method for pre-treating a substrate using an electrostatic self-assembly process with nano diamond particles and a method for depositing a diamond thin film using the same. A surface of a nano diamond particle is coated with a polymer having an opposite polarity with respect to an electrostatic charge on the surface of the nano diamond particle. A surface of a substrate is treated with a polymer having an opposite polarity with respect to an electrostatic discharge on the substrate. The surface-treated substrate is immersed into a solution in which the coated nano diamond particles are dispersed. The nano diamond particle is deposited on the substrate through an electrostatic self-assembly process, so that it is used as a deposition core during a diamond thin film deposition. The polymer is selected from a group consisting of PSS(Poly Sodium 4-styrenen sulfonate), poly S-119, polyaniline, nafion, and PDDA(Poly DiallylDimethyl Ammonium chloride).
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申请公布号 |
KR20080063227(A) |
申请公布日期 |
2008.07.03 |
申请号 |
KR20070141892 |
申请日期 |
2007.12.31 |
申请人 |
KOREA UNIVERSITY INDUSTRIAL & ACADEMIC COLLABORATION FOUNDATION |
发明人 |
LIM, DAE SOON;KIM, JONG HOON |
分类号 |
H01L21/208 |
主分类号 |
H01L21/208 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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