| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a vacuum lamination device and a vacuum lamination method which can connect the vacuum lamination device to a vacuum pump while the positioning lag of the vacuum lamination device to the vacuum pump is mitigated. <P>SOLUTION: In the exhaust port 1b of the vacuum lamination device, a check valve 1d for preventing air from flowing into a venthole through the exhaust port 1b is mounted, and the tip of the exhaust port 1b is constituted in a spherical shape. Particularly, the vacuum lamination device, the vacuum lamination method are suitable by applying them to the vacuum lamination method of a solar cell module. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
