| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a focus control method with which the focus control of an optical system or an optical device is more accurately performed. <P>SOLUTION: The reference system of an entire system is set by using a reference pattern (5) for focus control. The focus of the optical device for inspecting a sample or measuring the physical quantity of the sample and the focus of an autofocus mechanism are matched with the reference system. The displacement object of the autofocus mechanism is set to the surface (4) of the sample, displacement quantity from a reference point on the surface of the sample is measured, and a displaced point is set as the acting point of the control of the autofocus mechanism, thereby controlling the focus of the objective (6) of the optical device. When setting the reference system, a Becke's effect is utilized for the reference pattern to determine focusing. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
