| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a sheet sticking apparatus and method whereby even when a plate-form member and a frame having respectively different thicknesses from each other are fed, a sheet can be stuck surely on both the member and frame. <P>SOLUTION: In the sheet sticking method, the system wherein first, second, and third single-axis robots 16, 18, 19 used as the respective moving means of a press roller 2, an inside table 4, and an outside table 5 are controlled independently of each other is adopted. Thereby, the position wherein a dicing tape DT and the top surface of a wafer W are contacted with each other is used as a sticking reference position P. In this state, the press roller 2, the inside table 4, and the outside table 5 are so moved respectively in response to the thicknesses of the dicing tape DT, the wafer W, and a ring frame F that the wafer W and the ring frame F are united with each other. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
