| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an organic electroluminescent element in which a moisture content intruding into an organic EL layer from an insulation layer and a pixel separation membrane is reduced. SOLUTION: In a process in which an interface including an insulation layer composed of an insulation membrane covering a TFT on a substrate and a flattened membrane, an electrode and pixel separation membrane or the like is formed, a dehydration treatment is carried out in an environment where a dew-point temperature is controlled at -60°C or lower. Moreover, all processes before forming an organic EL layer after the dehydration process are carried out in an environment where a dew-point temperature is controlled at -60°C or lower. Moisture absorption of the interface after dehydration is prevented and performance deterioration due to contained moisture of the organic EL layer is avoided. COPYRIGHT: (C)2008,JPO&INPIT
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