| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method for a semiconductor integrated circuit including an equalization process for generating a burn-in test pattern for equalizing the number of times of toggling on each element level of the semiconductor integrated circuit. SOLUTION: This inspection method for the semiconductor integrated circuit includes a burn-in pattern generating process for generating a burn-in test pattern for performing a burn-in test for the integrated circuit, and the generating process is characterized by including an equalization process for generating an equalization burn-in test pattern equalizing the number of times of toggling on each element level of the semiconductor integrated circuit. COPYRIGHT: (C)2008,JPO&INPIT
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