发明名称 Top contact alignment in semiconductor devices
摘要 According to an example embodiment, a semiconductor device includes a lower electrode ( 316 ) disposed on an oxide layer ( 302 ), an upper electrode ( 320 ) disposed on the lower electrode, a dielectric pattern ( 322 ) disposed on the oxide layer and surrounding the upper electrode, the upper electrode protruding above an upper surface of the dielectric pattern, and a contact pattern ( 328 ) that is contiguous with the upper electrode and the dielectric pattern.
申请公布号 US2008160640(A1) 申请公布日期 2008.07.03
申请号 US20070649094 申请日期 2007.01.03
申请人 BUTCHER BRIAN R;NAGEL KERRY J;SMITH KENNETH H 发明人 BUTCHER BRIAN R.;NAGEL KERRY J.;SMITH KENNETH H.
分类号 H01L21/00 主分类号 H01L21/00
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