| 摘要 |
An apparatus for manufacturing a flat panel display is provided to attach a filter to a portion of a process chamber, which is connected with an exhaust unit, to prevent a liquid from being vaporized and discharged when process gases are exhausted through the exhaust unit. An apparatus for manufacturing a flat panel display includes a process chamber(104), an exhaust unit(200), and a filter(300). The process chamber has an opening disposed at a predetermined region of the upper part thereof. The exhaust unit is located outside the process chamber, connected to the opening of the process chamber and exhausts gas from the process chamber. The filter includes a cylindrical body, an exhaust port connected to the body to form a passage and inserted into the opening of the process chamber, and a plurality of barrier ribs for guiding flow of gas from the bottom of the body to the exhaust port. The filter is set inside the process chamber and fitted in the opening of the process chamber. |
