发明名称 MONITORING SUPPORT DEVICE FOR MANUFACTURING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a monitoring support device for a manufacturing device that can record communication data of the manufacturing device and a host computer and read desired operation data out of the manufacturing device. SOLUTION: A control means of the monitoring support device 10 is connected to the manufacturing device 30 by a manufacturing-device-side communication line L1a, and connected to the host computer 20 by a host-side communication line L1b, connected to a data gathering device 40 by a second communication line L2. When messages in a first message group are transmitted one of the manufacturing device and host computer to the other through the manufacturing-device-side communication line or host-side communication line, a transmitted message is transmitted to the other each time the transmitted message is received, and a second message group including the messages in the first message group is transmitted to the data gathering device through the second communication line each time the transmission or reception of the final message in the first message group is completed. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008153488(A) 申请公布日期 2008.07.03
申请号 JP20060340934 申请日期 2006.12.19
申请人 NIPPO LTD 发明人 OGAWA TOMONORI;NAKAMURA KAZUYA
分类号 H01L21/02 主分类号 H01L21/02
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