发明名称 Composite Polishing Pad
摘要 A polishing pad having an optically clear bottom layer and a closed cell top layer where the interface between the top and bottom layers is only a urethane to urethane interface. Grooves may be machined into the top layer or through the top layer and into the bottom layer.
申请公布号 US2008155903(A1) 申请公布日期 2008.07.03
申请号 US20080049872 申请日期 2008.03.17
申请人 RIMPAD TECH LTD. 发明人 PRESTON SPENCER
分类号 C09K3/14;B24B37/20;B24B37/24;B24B37/26 主分类号 C09K3/14
代理机构 代理人
主权项
地址