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发明名称
Vorrichtung und Verfahren zur relativen Positionsmessung einer periodischen oder quasi-periodischen Markierung
摘要
申请公布号
DE602005007013(D1)
申请公布日期
2008.07.03
申请号
DE200560007013T
申请日期
2005.08.03
申请人
CSEM CENTRE SUISSE D`ELECTRONIQUE ET DE MICROTECHNIQUE S.A. - RECHERCHE ET DEVELOPPEMENT
发明人
FRANZI, EDOARDO;HEIM, PASCAL;MASA, PETER
分类号
G01D5/244
主分类号
G01D5/244
代理机构
代理人
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