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发明名称
Verfahren zur Bestimmung von Strukturparametern einer Oberfläche mit einem lernfähigen System
摘要
申请公布号
DE10302868(B4)
申请公布日期
2008.07.03
申请号
DE20031002868
申请日期
2003.01.25
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
WEIDNER, ANDREA;ERDMANN, ANDREAS;SCHNEIDER, CLAUS
分类号
H01L21/66;G01B11/02;G01B11/06;G01N21/47
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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