| 摘要 |
A mega-sonic apparatus is provided to maximize a cleaning effect of a rod by directly spraying a cleaning solution to a rod, thereby maintaining the cleanness of the apparatus and thus improving the effect of cleaning a substrate. A megasonic apparatus includes a rod(110) disposed on one end of an arm(120) and receiving megasonic energy to generate vibration, and a first nozzle for spraying a first cleaning solution to the rod. The nozzle is connected to the arm at one end thereof, and the other end is positioned adjacent to the rod. The first nozzle is rotatable, and an angle of the first nozzle is adjusted. One end of a second nozzle(140) for spraying a second cleaning solution to the rod is connected to the arm, and the other end is disposed adjacent to the rod.
|
