| 摘要 |
A chemical vapor deposition repair apparatus for a liquid crystal display device and a repairing method thereof are provided to reduce the inspecting time by forming a sensor part for detecting the repair condition of a defect area. A chemical vapor deposition repair apparatus for a liquid crystal display device comprises a table(102) wherein a substrate(101) with a pattern is mounted, and a repair unit(120). The repair unit, placed at the table, repairs a defect area on the substrate, and includes a repair part(121) and a sensor part(123). The repair part repairs the defect area of the substrate using chemical vapor deposition. The sensor part detects the repair condition of the repaired area and has a transmitting part discharging a signal to the substrate, and a receiving part detecting the signal discharged from the transmitting part via the substrate.
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