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发明名称
Plasmabearbeitungsgerät
摘要
申请公布号
DE69738704(D1)
申请公布日期
2008.07.03
申请号
DE19976038704
申请日期
1997.09.25
申请人
SURFACE TECHNOLOGY SYSTEMS PLC, NEWPORT
发明人
BHARDWAJ, JYOTI KIRON;LEA, LESLIE MICHAEL
分类号
H01J37/32;C23C16/50;C23F4/00;H01L21/205;H01L21/302;H01L21/31;H01Q7/00;H05H1/46
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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